Chuck with integrated wafer support

ABSTRACT

An improved chuck with lift pins within a probe station. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to the upper surface of the chuck assembly.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No. 11/655,605, filed Jan. 19, 2007, now U.S. Pat. No. 7,362,115; which application is a continuation of U.S. patent application Ser. No. 10/927,247, filed Aug. 26, 2004, now U.S. Pat. No. 7,187,188, which claims the benefit of U.S. Provisional Application No. 60/532,757, filed Dec. 24, 2003.

BACKGROUND OF THE INVENTION

The present application relates to an improved chuck and an improved probe station.

With reference to FIGS. 1, 2 and 3, a probe station comprises a base 10 (shown partially) which supports a platen 12 through a number of jacks 14 a, 14 b, 14 c, 14 d which selectively raise and lower the platen vertically relative to the base by a small increment (approximately one-tenth of an inch) for purposes to be described hereafter. Also supported by the base 10 of the probe station is a motorized positioner 16 having a rectangular plunger 18 which supports a movable chuck assembly 20 for supporting a wafer or other test device. The chuck assembly 20 passes freely through a large aperture 22 in the platen 12 which permits the chuck assembly to be moved independently of the platen by the positioner 16 along X, Y and Z axes, i.e. horizontally along two mutually-perpendicular axes X and Y, and vertically along the Z axis. Likewise, the platen 12, when moved vertically by the jacks 14, moves independently of the chuck assembly 20 and the positioner 16.

Mounted atop the platen 12 are multiple individual probe positioners such as 24 (only one of which is shown), each having an extending member 26 to which is mounted a probe holder 28 which in turn supports a respective probe 30 for contacting wafers and other test devices mounted atop the chuck assembly 20. The probe positioner 24 has micrometer adjustments 34, 36 and 38 for adjusting the position of the probe holder 28, and thus the probe 30, along the X, Y and Z axes respectively, relative to the chuck assembly 20. The Z axis is exemplary of what is referred to herein loosely as the “axis of approach” between the probe holder 28 and the chuck assembly 20, although directions of approach which are neither vertical nor linear, along which the probe tip and wafer or other test device are brought into contact with each other, are also intended to be included within the meaning of the term “axis of approach.” A further micrometer adjustment 40 adjustably tilts the probe holder 28 to adjust planarity of the probe with respect to the wafer or other test device supported by the chuck assembly 20. As many as twelve individual probe positioners 24, each supporting a respective probe, may be arranged on the platen 12 around the chuck assembly 20 so as to converge radially toward the chuck assembly similarly to the spokes of a wheel. With such an arrangement, each individual positioner 24 can independently adjust its respective probe in the X, Y and Z directions, while the jacks 14 can be actuated to raise or lower the platen 12 and thus all of the positioners 24 and their respective probes in unison.

An environment control enclosure is composed of an upper box portion 42 rigidly attached to the platen 12, and a lower box portion 44 rigidly attached to the base 10. Both portions are made of steel or other suitable electrically conductive material to provide EMI shielding. To accommodate the small vertical movement between the two box portions 42 and 44 when the jacks 14 are actuated to raise or lower the platen 12, an electrically conductive resilient foam gasket 46, preferably composed of silver or carbon-impregnated silicone, is interposed peripherally at their mating juncture at the front of the enclosure and between the lower portion 44 and the platen 12 so that an EMI, substantially hermetic, and light seal are all maintained despite relative vertical movement between the two box portions 42 and 44. Even though the upper box portion 42 is rigidly attached to the platen 12, a similar gasket 47 is preferably interposed between the portion 42 and the top of the platen to maximize sealing.

With reference to FIGS. 5A and 5B, the top of the upper box portion 42 comprises an octagonal steel box 48 having eight side panels such as 49 a and 49 b through which the extending members 26 of the respective probe positioners 24 can penetrate movably. Each panel comprises a hollow housing in which a respective sheet 50 of resilient foam, which may be similar to the above-identified gasket material, is placed. Slits such as 52 are partially cut vertically in the foam in alignment with slots 54 formed in the inner and outer surfaces of each panel housing, through which a respective extending member 26 of a respective probe positioner 24 can pass movably. The slitted foam permits X, Y and Z movement of the extending members 26 of each probe positioner, while maintaining the EMI, substantially hermetic, and light seal provided by the enclosure. In four of the panels, to enable a greater range of X and Y movement, the foam sheet 50 is sandwiched between a pair of steel plates 55 having slots 54 therein, such plates being slidable transversely within the panel housing through a range of movement encompassed by larger slots 56 in the inner and outer surfaces of the panel housing.

Atop the octagonal box 48, a circular viewing aperture 58 is provided, having a recessed circular transparent sealing window 60 therein. A bracket 62 holds an apertured sliding shutter 64 to selectively permit or prevent the passage of light through the window. A stereoscope (not shown) connected to a CRT monitor can be placed above the window to provide a magnified display of the wafer or other test device and the probe tip for proper probe placement during set-up or operation. Alternatively, the window 60 can be removed and a microscope lens (not shown) surrounded by a foam gasket can be inserted through the viewing aperture 58 with the foam providing EMI, hermetic and light sealing. The upper box portion 42 of the environment control enclosure also includes a hinged steel door 68 which pivots outwardly about the pivot axis of a hinge 70 as shown in FIG. 2A. The hinge biases the door downwardly toward the top of the upper box portion 42 so that it forms a tight, overlapping, sliding peripheral seal 68 a with the top of the upper box portion. When the door is open, and the chuck assembly 20 is moved by the positioner 16 beneath the door opening as shown in FIG. 2A, the chuck assembly is accessible for loading and unloading.

With reference to FIGS. 3 and 4, the sealing integrity of the enclosure is likewise maintained throughout positioning movements by the motorized positioner 16 due to the provision of a series of four sealing plates 72, 74, 76 and 78 stacked slidably atop one another. The sizes of the plates progress increasingly from the top to the bottom one, as do the respective sizes of the central apertures 72 a, 74 a, 76 a and 78 a formed in the respective plates 72, 74, 76 and 78, and the aperture 79 a formed in the bottom 44 a of the lower box portion 44. The central aperture 72 a in the top plate 72 mates closely around the bearing housing 18 a of the vertically-movable plunger 18. The next plate in the downward progression, plate 74, has an upwardly-projecting peripheral margin 74 b which limits the extent to which the plate 72 can slide across the top of the plate 74. The central aperture 74 a in the plate 74 is of a size to permit the positioner 16 to move the plunger 18 and its bearing housing 18 a transversely along the X and Y axes until the edge of the top plate 72 abuts against the margin 74 b of the plate 74. The size of the aperture 74 a is, however, too small to be uncovered by the top plate 72 when such abutment occurs, and therefore a seal is maintained between the plates 72 and 74 regardless of the movement of the plunger 18 and its bearing housing along the X and Y axes. Further movement of the plunger 18 and bearing housing in the direction of abutment of the plate 72 with the margin 74 b results in the sliding of the plate 74 toward the peripheral margin 76 b of the next underlying plate 76. Again, the central aperture 76 a in the plate 76 is large enough to permit abutment of the plate 74 with the margin 76 b, but small enough to prevent the plate 74 from uncovering the aperture 76 a, thereby likewise maintaining the seal between the plates 74 and 76. Still further movement of the plunger 18 and bearing housing in the same direction causes similar sliding of the plates 76 and 78 relative to their underlying plates into abutment with the margin 78 b and the side of the box portion 44, respectively, without the apertures 78 a and 79 a becoming uncovered. This combination of sliding plates and central apertures of progressively increasing size permits a full range of movement of the plunger 18 along the X and Y axes by the positioner 16, while maintaining the enclosure in a sealed condition despite such positioning movement. The EMI sealing provided by this structure is effective even with respect to the electric motors of the positioner 16, since they are located below the sliding plates.

With particular reference to FIGS. 3, 6 and 7, the chuck assembly 20 is a modular construction usable either with or without an environment control enclosure. The plunger 18 supports an adjustment plate 79 which in turn supports first, second and third chuck assembly elements 80, 81 and 83, respectively, positioned at progressively greater distances from the probe(s) along the axis of approach. Element 83 is a conductive rectangular stage or shield 83 which detachably mounts conductive elements 80 and 81 of circular shape. The element 80 has a planar upwardly-facing wafer-supporting surface 82 having an array of vertical apertures 84 therein. These apertures communicate with respective chambers separated by O-rings 88, the chambers in turn being connected separately to different vacuum lines 90 a, 90 b, 90 c (FIG. 6) communicating through separately-controlled vacuum valves (not shown) with a source of vacuum. The respective vacuum lines selectively connect the respective chambers and their apertures to the source of vacuum to hold the wafer, or alternatively isolate the apertures from the source of vacuum to release the wafer, in a conventional manner. The separate operability of the respective chambers and their corresponding apertures enables the chuck to hold wafers of different diameters.

In addition to the circular elements 80 and 81, auxiliary chucks such as 92 and 94 are detachably mounted on the corners of the element 83 by screws (not shown) independently of the elements 80 and 81 for the purpose of supporting contact substrates and calibration substrates while a wafer or other test device is simultaneously supported by the element 80. Each auxiliary chuck 92, 94 has its own separate upwardly-facing planar surface 100, 102 respectively, in parallel relationship to the surface 82 of the element 80. Vacuum apertures 104 protrude through the surfaces 100 and 102 from communication with respective chambers within the body of each auxiliary chuck. Each of these chambers in turn communicates through a separate vacuum line and a separate independently-actuated vacuum valve (not shown) with a source of vacuum, each such valve selectively connecting or isolating the respective sets of apertures 104 with respect to the source of vacuum independently of the operation of the apertures 84 of the element 80, so as to selectively hold or release a contact substrate or calibration substrate located on the respective surfaces 100 and 102 independently of the wafer or other test device. An optional metal shield 106 may protrude upwardly from the edges of the element 83 to surround the other elements 80, 81 and the auxiliary chucks 92, 94.

All of the chuck assembly elements 80, 81 and 83, as well as the additional chuck assembly element 79, are electrically insulated from one another even though they are constructed of electrically conductive metal and interconnected detachably by metallic screws such as 96. With reference to FIGS. 3 and 3A, the electrical insulation results from the fact that, in addition to the resilient dielectric O-rings 88, dielectric spacers 85 and dielectric washers 86 are provided. These, coupled with the fact that the screws 96 pass through oversized apertures in the lower one of the two elements which each screw joins together thereby preventing electrical contact between the shank of the screw and the lower element, provide the desired insulation. As is apparent in FIG. 3, the dielectric spacers 85 extend over only minor portions of the opposing surface areas of the interconnected chuck assembly elements, thereby leaving air gaps between the opposing surfaces over major portions of their respective areas. Such air gaps minimize the dielectric constant in the spaces between the respective chuck assembly elements, thereby correspondingly minimizing the capacitance between them and the ability for electrical current to leak from one element to another. Preferably the spacers and washers 85 and 86, respectively, are constructed of a material having the lowest possible dielectric constant consistent with high dimensional stability and high volume resistivity. A suitable material for the spacers and washers is glass epoxy, or acetal homopolymer marketed under the trademark Delrin by E.I. DuPont.

With reference to FIGS. 6 and 7, the chuck assembly 20 also includes a pair of detachable electrical connector assemblies designated generally as 108 and 110, each having at least two conductive connector elements 108 a, 108 b and 110 a, 110 b, respectively, electrically insulated from each other, with the connector elements 108 b and 110 b preferably coaxially surrounding the connector elements 108 a and 110 a as guards therefor. If desired, the connector assemblies 108 and 110 can be triaxial in configuration so as to include respective outer shields 108 c, 110 c surrounding the respective connector elements 108 b and 110 b, as shown in FIG. 7. The outer shields 108 c and 110 c may, if desired, be connected electrically through a shielding box 112 and a connector supporting bracket 113 to the chuck assembly element 83, although such electrical connection is optional particularly in view of the surrounding EMI shielding enclosure 42, 44. In any case, the respective connector elements 108 a and 110 a are electrically connected in parallel to a connector plate 114 matingly and detachably connected along a curved contact surface 114 a by screws 114 b and 114 c to the curved edge of the chuck assembly element 80. Conversely, the connector elements 108 b and 110 b are connected in parallel to a connector plate 116 similarly matingly connected detachably to element 81. The connector elements pass freely through a rectangular opening 112 a in the box 112, being electrically insulated from the box 112 and therefore from the element 83, as well as being electrically insulated from each other. Set screws such as 118 detachably fasten the connector elements to the respective connector plates 114 and 116.

Either coaxial or, as shown, triaxial cables 118 and 120 form portions of the respective detachable electrical connector assemblies 108 and 110, as do their respective triaxial detachable connectors 122 and 124 which penetrate a wall of the lower portion 44 of the environment control enclosure so that the outer shields of the triaxial connectors 122, 124 are electrically connected to the enclosure. Further triaxial cables 122 a, 124 a are detachably connectable to the connectors 122 and 124 from suitable test equipment such as a Hewlett-Packard 4142B modular DC source/monitor or a Hewlett-Packard 4284A precision LCR meter, depending upon the test application. If the cables 118 and 120 are merely coaxial cables or other types of cables having only two conductors, one conductor interconnects the inner (signal) connector element of a respective connector 122 or 124 with a respective connector element 108 a or 110 a, while the other conductor connects the intermediate (guard) connector element of a respective connector 122 or 124 with a respective connector element 108 b, 110 b. U.S. Pat. No. 5,532,609 discloses a probe station and chuck and is hereby incorporated by reference.

The chuck assembly 20 with corresponding vertical apertures 84 and respective chambers separated by O-rings 88 permits selectively creating a vacuum within three different zones. Including the three O-rings 88 and the dielectric spacers 85 surrounding the metallic screws 96 permits securing adjacent first, second and third chuck assembly elements 80, 81 and 83 together. The concentric O-rings 88 are squeezed by the first and second chuck assembly elements and assist in distributing the force across the upper surface of the chuck assembly 20 to maintain a flat surface. However, the O-rings and dielectric spacers 85 have a greater dielectric constant than the surrounding air resulting in leakage currents. Also, the additional material between adjoining chuck assembly elements 80, 81, and 83 decreases the capacitance between the adjoining chuck assembly elements. Moreover, the dielectric material of the O-rings and dielectric spacers 85 builds up a charge therein during testing which increases the dielectric absorption. The O-rings and dielectric spacers 85 provides mechanical stability against warping the chuck when a wafer thereon is probed so that thinner chuck assembly elements 80, 81, and 83 may be used. The height of the different O-rings and dielectric spacers 85 tend to be slightly different which introduces non-planarity in the upper surface when the first, second, and third chuck assembly elements 80, 81, and 83 are secured together.

The foregoing and other objectives, features, and advantages of the invention will be more readily understood upon consideration of the following detailed description of the invention, taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 is a partial front view of an exemplary embodiment of a wafer probe station constructed in accordance with the present invention.

FIG. 2 is a top view of the wafer probe station of FIG. 1.

FIG. 2A is a partial top view of the wafer probe station of FIG. 1 with the enclosure door shown partially open.

FIG. 3 is a partially sectional and partially schematic front view of the probe station of FIG. 1.

FIG. 3A is an enlarged sectional view taken along line 3A-3A of FIG. 3.

FIG. 4 is a top view of the sealing assembly where the motorized positioning mechanism extends through the bottom of the enclosure.

FIG. 5A is an enlarged top detail view taken along line 5A-5A of FIG. 1.

FIG. 5B is an enlarged top sectional view taken along line 5B-5B of FIG. 1.

FIG. 6 is a partially schematic top detail view of the chuck assembly, taken along line 6-6 of FIG. 3.

FIG. 7 is a partially sectional front view of the chuck assembly of FIG. 6.

FIG. 8 illustrates a probe station with a chuck that includes a stage with lift pins that is movable without x, y, and z positioners.

FIG. 9 illustrates a chuck with lift pins having a handle at zero degrees.

FIG. 10 illustrates a chuck with lift pins having a handle at six degrees.

FIG. 11 illustrates a chuck with lift pins having a handle at 12 degrees.

FIG. 12 illustrates a chuck with lift pins having a handle at 30 degrees.

FIG. 13 illustrates a side view of the chuck with the lift pins retracted.

FIG. 14 illustrates a side view of the chuck prior to lifting the lift pins.

FIG. 15 illustrates a side view of the chuck with the lift pins raised.

FIG. 16 illustrates a platen insert with even airflow.

FIG. 17 illustrates an air port.

FIG. 18 illustrates a baffle around the chuck.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENT

The present inventors considered existing roll out chuck stages and determined that it is easier to properly position a wafer on the rolled out chuck, together with the desired theta orientation of the wafer with respect to the chuck, when the chuck stage is extended at least partially outside of the chamber. Unfortunately, in the event that the chuck is heated or cooled, such as to 300 degrees Celsius or cooled significantly below ambient temperature, placing an ambient temperature wafer on the chuck tends to result in damage to the devices on the wafer or otherwise results in fracturing the wafer itself. In either case, the wafer is susceptible to becoming damaged. In some cases the user could manually hold the wafer on a wafer holder in the vicinity of the chuck until the wafer is sufficiently heated, but this is difficult at best, for the user to accomplish. Further, it is difficult to achieve similar such temperatures using a wafer holder because of the insulating effect of the wafer holder and the distance of the wafer from the surface of the chuck. Also, the user has a tendency to accidently touch the surface of the chuck with his hand, thus resulting in painful burning or freezing of his hand. In addition, even with a chuck at ambient temperature the wafer is typically placed on the upper surface of the chuck using a motion that is at an acute angle to the upper surface of the chuck, and accordingly, the wafer tends to slide across the chuck surface thus coming to rest at a non-desirable location, if it remains on the chuck at all.

Referring to FIG. 8, a roll-out includes a stage that is movable with respect to the chamber. Preferably, the stage at least partially exists the chamber while the x, y, z positioner remains within the chamber. To alleviate concerns the present inventors came to the realization that a set of movable pins 200, generally referred to as lift pins, incorporated within the roll-out chuck 210 would, (1) simplify the positioning of the wafer on the chuck by placing the wafer on the lift pins 200, (2) decrease the likelihood of damage to the user's hand by accidently touching the chuck surface 212, (3) permit the wafer to be held in a position above the chuck so that the wafer may adjust to a temperature closer to the temperature of the chuck surface, and/or (4) decrease the likelihood of the wafer sliding out of position. The lift pins 200 incorporated within the chuck 210 may include a plurality of members spatially arranged around the chuck 210 that may be selectively raised and/or lowered. Alternatively, the lift pins may remain stationary and the surface of the chuck may be raised or lowered. In any case, the lift pins 200 and upper surface 212 of the chuck 210 include relative vertical motion with respect to one another. The maximum distance between the top of the lift pins and the upper surface of the chuck is preferably approximately 0.25 inches.

One technique to engage the lift pins is to use a motor, such as a stepper motor, to lift the pins. The stepper motor may be controlled by software or otherwise by the user indicating the desire to lift or lower the lift pins. Another alternative to engage the lift pins is to use a pneumatic system that is controlled by software or otherwise by the user indicating the desire to lift or lower the lift pins. Another technique, that provides more tactile feedback to the user is to use a mechanical linkage system controlled by the user. Referring to FIG. 9, a mechanical linkage system includes a handle 250 connected to a lever 252 that rotates about pivot point 254 (0 degrees of rotation) that may be rotated as illustrated in FIG. 10 (6 degrees of rotation), FIG. 11 (12 degrees of rotation), and FIG. 12 (30 degrees of rotation) to fully extend the lift pins 200 above the upper surface of the chuck. With the lift pins 200 extended, as illustrated in FIG. 12, the wafer is properly positioned on the lift pins 200. In addition, in the event that the upper surface of the chuck is not at ambient temperature, the user is not likely to accidently touch the chuck. Also, the wafer may be slowly heated or cooled by being spaced apart from the upper surface of the chuck, which decreases the likelihood of damaging the devices on the wafer or otherwise fracturing the wafer itself.

When the lift pins are fully extended or otherwise are not fully retracted, the chuck 210 and the associated stage is locked out from being retracted within the chamber or otherwise being moved to a suitable probing position. The lift pins are considered fully retracted when the lift pins are lowered to a level substantially even with the upper surface of the chuck or lower. In many cases, when the lift pins are extended the wafer is at a higher elevation than when the lift pins are retracted. By inhibiting the stage from being retracted within the chamber when the lift pins are not fully retracted, or otherwise the lift pins are fully extended, reduces the likelihood that the wafer will inadvertently strike a probe upon retraction of the stage within the chamber.

Moving the handle of the lift mechanism from 30 degrees as illustrated in FIG. 12, to 12 degrees as illustrated in FIG. 11, rotates the lever 252 about the pivot point 254. A plate 256 when fully retracted (see FIG. 12) inhibits a vacuum from a vacuum switch 260 from being provided to openings 216 in the upper surface 212 of the chuck 210 (hoses not shown). When the plate 256 is partially inserted within the vacuum switch 260 (see FIG. 11) as a result of rotating the lever 252 it causes a vacuum to be provided to the openings in the upper surface of the chuck. In addition, while moving the lever 252 the lift pins 200 are preferably partially retracted. Accordingly, the partial retraction of the lift pins 200, and thus the lowering of the wafer toward the upper surface of the chuck, results in the activation of the vacuum switch 260.

Further retraction of the lift pins 200 by rotating the handle 250 of the lever to six degrees, as illustrated in FIG. 10, results in the disengagement of the roll out interlock 258 (locking mechanism). In this manner, the wafer is close to the upper surface of the chuck and is less likely to impact the probes if moved within the chamber. The lockout of the chuck may also be released when the lift pins are fully retracted or otherwise the wafer is supported by the upper surface of the chuck. Also, the release of the lockout mechanism while the lift pins 200 maintain the wafer above the upper surface of the chuck permits the chuck to be retracted within the chamber so that the wafer and upper surface of the chuck may both substantially reach the desired operating temperature.

Further retraction of the lift pins by rotating the handle of the lift mechanism to 0 degrees, as illustrated in FIG. 9, results in the wafer being supported by the upper surface of the chuck. The lift pins are typically recessed slightly below the upper surface of the chuck or otherwise substantially even with the upper surface of the chuck. Engaging the vacuum source prior to, or simultaneously therewith, the wafer coming into contact with the upper surface of the chuck reduces the likelihood that the wafer will skate or otherwise exhibit undesirable movement on the upper surface of the chuck.

The chuck may be retracted within the chamber with the wafer supported thereon for subsequent probing. While the chuck is retracted within the chamber, or otherwise not fully extended, the handle is locked out from being moved. The locking out of the handle and thus the lift pin mechanism reduces the likelihood that the handle will be inadvertently moved or otherwise the lift pins will be in pressing engagement with the wafer that is being secured by the vacuum on the upper surface of the chuck. Otherwise there would be a possibility for the user to inadvertently move the handle and thus drive the lift pins through the wafer itself, thus damaging part of the wafer.

The lockout of the lift pin mechanism is engaged when the chuck is sufficiently retracted or otherwise not fully extended, such as within the chamber. Also, the lockout of the lift pen mechanism is disengaged when the chuck is fully extended, or is otherwise at some point other than being fully retracted within the chamber for probing. Having the lockout mechanism engaged when the chuck is fully retracted reduces the likelihood of the user accidently causing the lift pins into pressing engagement with the wafer. Also, having the lockout mechanism engaged when the chuck is fully retracted reduces the likelihood of lifting the wafer off the upper surface of the chuck into the probes, and then reduces the likelihood of the chuck being in motion while the wafer is supported by the lift pins thus causing the wafer to slide off the lift pins within the chamber if the chuck is abruptly moved.

When the chuck is fully extended or otherwise sufficiently moved from its probing position, the lockout mechanism of the lift pins is disengaged. Referring again to FIG. 9, the handle 250 may be moved to lift the lift pins 200. The motion of the handle 250 moves a locking mechanism 258, which causes the stage to be locked in position, as illustrated in FIG. 10.

Sufficient rotation of the handle 250 and lever 252 causes the plate 256 to be retracted from vacuum switch 260 which turns off the vacuum to the upper surface of the chuck, as illustrated in FIG. 11. The mechanical motion of the handle 250 and lever 252 disengaging the vacuum switch 260 facilitates the wafer being lifted from the upper surface of the chuck. With the wafer securement mechanism being released, the wafer is more readily lifted by the lift pins 200.

After disengaging the vacuum to the upper surface of the chuck it turns out that there remains a residual vacuum suction between the upper surface of the chuck and the wafer which impedes lifting the wafer. To release the residual vacuum suction it was determined that a limited amount of air should be provided to the lower surface of the wafer. The additional air pressure is preferably provided through the vacuum lines to the chuck, but may be provided using different openings. The air pressure may be provided by the vacuum source. Preferably the air pressure is provided by expended air from a cylinder 272 that is used to raise and lower the lift pins through line 264, where the air pressure results from the movement of the lever 252. In this manner, the motion of the handle 250 and lever 252 causes the air pressure which helps to release the wafer from the upper surface of the chuck. Therefore, the air pressure will be provided to the upper surface of the chuck at the appropriate time and is not dependent upon whether the user moves the lever 252 quickly or slowly. One or more of the lockout features, and vacuum features may be omitted or otherwise performed in a different order.

As previously noted, the movement of the handle 250 results in the shutting off the vacuum pressure to the wafer prior to raising the lift pins 200 above the upper surface of the chuck. As illustrated in FIGS. 9-12, the movement of the lever 252 moves a pin 270 inwardly which results in the movement of the outer portion of the air cylinder 272. Referring to FIG. 13 (lever at 0 degrees), the movement of the cylinder 272 causes a decrease in the region between a piston 278 and the end of the cylinder 272. Referring to FIG. 14, the piston 278 as a result of the increase in air pressure within the cylinder tends to move the drive plate 280 outwardly. The drive plate 280 is connected to a lift plate 282 by a resilient mechanism, namely a spring 284. As the drive plate 280 is moved, the lift plate 282 is likewise moved by the force applied by the spring 284. Movement of the lift plate 282 results in a bearing 286 of a lift pin assembly 284 being raised as the bearing 286 moves up a ramp 288. As it may be observed, if the wafer is stuck to the upper surface of the chuck by residual vacuum, the lift pin assembly 284 reduces its movement or otherwise is inhibited from movement by the resiliency of the spring 284. It is noted that during the movement of the cylinder 272 air is routed through air line 264 to provide air to the upper surface of the chuck to reduce residual vacuum. This linkage system provides some added benefits. One such benefit of the linage system is that the lift pin assembly 284 is not directly coupled to the lever 252 so that the applied force will not cause the lift pins 200 to break through the wafer. Another benefit of the linkage system is to provide a elastic mechanism that inhibits the ability of the lift pins 200 to break through the wafer. Yet another benefit of the linkage system is to inhibit the speed at which the lift pin assembly 284 may lift the lift pins by the action of the spring 284. Accordingly, the speed at which the lift pins are raised is not a direct relationship to the speed at which the lever 252 is moved.

Referring to FIG. 15, once the residual vacuum is relieved between the wafer and the upper surface of the chuck, the pressure exerted by the spring will tend to propel the lift plate assembly 282 upwardly, thus raising the wafer on the lift pins 200. Since the drive plate 280 is stationary when the lever 252 is fully rotated, the piston 278 moves in the cylinder 272 pulling in air. The chuck valve assembly routes air from the cylinder to the vacuum valve on the inward motion of the piston and provides makeup air via a needle valve as the piston pulls out. This controls the speed the pins lift once the suction is broken between the wafer and the chuck. The spring pulls the lift plate until its stop is against the drive plate.

It may be observed that the chuck preferably extends the portion supporting the wafer, while the stage which provides x, y, and z movements is not extended. In one embodiment, a set of one or more external pins or other member may extend upwardly above the upper surface of the chuck from the region surrounding a part of the upper surface of the chuck. The external pins inhibit the wafer from inadvertently sliding off the chuck. Preferably, the external pins extend above the height of the lift pins 200 when extended. In addition, the external pins preferably are raised prior to raising the lift pins and are preferably lowered after lowering the lift pins. In this manner, the external pins inhibit the possibility of the wafer from sliding off the lift pins or otherwise sliding off the upper surface of the chuck.

In some embodiments, the lift pins may be electrically interconnected to the same potential as the upper surface of the chuck. Alternatively, the lift pins may be electrically interconnected to the shield potential, the guard potential, the ground potential, or a floating potential. The lift pins may also include holes therein to which is selectively provided vacuum so that the wafer is more securely secured to the lift pins. The vacuum may be provided or released between any of the functions of the lift pin assembly.

The temperature of the chuck in thermal systems tends to vary between approximately −65 degrees Celsius and 300 degrees Celsius. When the thermal system undergoes cold conditions it is possible for ice crystals to form on the wafer under test. To inhibit the creation of ice crystals the chamber should (1) maintain the dew point of the air in the chamber below any surface temperature the air can contact; (2) introduce low velocity air across the probes, so as to avoid creating undesirable vibrations which could result in electrical noise; (3) transfer only a small amount of heat at the surface of the chuck to avoid the creation of significant temperature variations; (4) provide air to the chamber in a uniform manner to avoid non-uniform temperature variations; (5) limited heat transfer from the chuck to the air to facilitate rapid transition times between different measurements at different temperatures; and/or (6) transfer a small amount of heat at the walls of the microchamber, so as to avoid “sweating” of the outside of the microchamber under cold conditions, and to avoid creating a burning hazard under hot conditions.

The chamber preferably includes one or more inlets for air, such as through the top hat and/or inlets to the chamber, and includes one or more defined outlets for the air, such as through the top hat and/or inlets to the chamber. Typically the chamber includes a series of leakage paths to facilitate the exit of air. The system preferably includes in excess of 75%, more preferably 90%, of the air exiting the chamber to pass through the defined outlets. In this manner, the flow of air through the chamber may be more accurately controlled. In this manner, minor differences in the construction of one probe station to another probe station will have negligible impact on the resulting air flow.

The preferred air entry into the chamber includes a plurality of spaced apart ports. The air entry points include one above the chuck itself, such as within the top hat, and a port proximate to each of the upper corners of the chamber. The principal designated air exit is preferably in the central region of the side wall of the chamber, having a size of approximately 1.5 inches by 4.5 inches.

Referring to FIG. 16, the air entry above the chuck is specifically designed to introduce the air through a platen insert in a low velocity, substantially laminar flow, having a radial component of velocity. The insert may include a pair of plates and baffles that substantially distribute air evenly around the platen insert. For example, the air may enter through three, four, five, six, or more openings. The intention is to provide the air drop smoothly through the opening in the platen onto the chuck where it smoothly distributes radially outward over the chuck. Another function of the air introduction involves air leakage through the top hat of the probe station. Under cold operating conditions, the chuck should produce a mild pumping action from the cold, heavier air flowing off the edges of the chuck. This flow of air should produce a slight vacuum in the center of the chuck that would tend to suck air through the top hat. Introducing air above the chuck helps assure that the pressure inside the top hat is always positive with respect to the pressure outside it. It has been determined that air flow between 8 and 12 cfh (0.13 to 0.2 cfm) is sufficient to reduce air leakage from the top hat and to provide a radial flow across the chuck having a velocity of a few millimeters per second at the outer edge.

While simply an opening may be provided between the interior of the chamber and the exterior of the chamber, such an opening tends to be sub-optimal when making low current low noise measurements. Referring to FIG. 17, a more suitable port to the chamber includes a diffuser that includes a plate of porous sintered stainless steel (such as 5 micron pore size) sandwiched in a frame. The air pressure is preferably connected to the base (shown on the right) and passes into a plenum behind the porous plate before being substantially evenly distributed by passing through it.

The air exit from the chamber may include a purge vent. The vent may include a plurality of identical, convoluted air passages that are stacked upon one another. The purpose of the air passage is to provide a low pressure drop laminar airflow path that would attenuate the passage of light and low frequency electromagnetic waves. In this manner there is no straight path through the air exit from the interior to the exterior of the chamber.

It may be observed that a chamber may include air introduction above the wafer with a substantially sealed chamber together with controlled exhaust. However, the air introduced onto the wafer from the top hat works well when the chuck is generally centered under the opening in the platen. However, when the chuck is sufficiently displaced to the side with respect to the opening for the top hat, then the air flow will be sufficiently uneven because a portion of the air will not impact the chuck, but rather, will pass straight down (or with minor deviation) into the chamber.

Referring to FIG. 18, to even out the air flow across the chuck when the chuck is sufficiently laterally displaced with respect to the opening in the top hat a baffle member may be included around at least a portion of the chuck, and more preferably around the majority, 75%, 95%, or 100% of the periphery of the chuck. The baffle member tends to act as an extension of the chuck and preferably has a sufficient width so that if the chuck is being probed at any particular edge, the baffle is still under all of the opening provided by the platen. For example, the width of the baffle may be the same as the opening in the platen. Further, there may be an opening around a majority of the chuck between the chuck and the baffle plate to provide for electrical isolation and an opening for the air to flow over the edge of the chuck.

The terms and expressions which have been employed in the foregoing specification are used therein as terms of description and not of limitation, and there is no intention, in the use of such terms and expressions, of excluding equivalents of the features shown and described or portions thereof, it being recognized that the scope of the invention is defined and limited only by the claims which follow. 

1. A probe station comprising: (a) a chuck assembly having an upper surface suitable to support a wafer thereon and movable in a direction substantially parallel to said upper surface from a first chuck position to a second chuck position; and (b) a plurality of members located within a periphery of said chuck assembly suitable to support said wafer; said members moveable with respect to said upper surface so as to be capable of relative vertical movement with respect to said upper surface; a range of vertical movement of at least one of said members relative to said upper surface variable as a consequence of said position of said chuck relative to said first chuck position.
 2. The probe station of claim 1 further comprising a chamber that is substantially airtight and surrounds said chuck when said chuck is in one of said first chuck position and said second chuck position.
 3. The probe station of claim 1 wherein said chuck includes a thermal unit to raise the temperature of said upper surface above ambient temperature.
 4. The probe station of claim 1 wherein said chuck includes a thermal unit to lower the temperature of said upper surface below ambient temperature.
 5. The probe station of claim 1 wherein said upper surface is substantially flat.
 6. The probe station of claim 1 wherein said plurality of members are substantially evenly spaced around said chuck.
 7. The probe station of claim 1 wherein said plurality of members are selectively raised or lowered.
 8. The probe station of claim 1 wherein said plurality of members are capable of being maintained at different elevations above said upper surface.
 9. The probe station of claim 1 wherein said plurality of members are movable in response to movement of a handle by a user.
 10. A chuck assembly comprising: (a) an upper surface suitable to support a wafer thereon; and (b) a plurality of members, each including a pin portion located within a periphery of said upper surface and movable in a direction substantially normal to said upper surface between a first pin position where said pin portion does not project from said upper surface to a second pin position where said pin portion projects from said upper surface and said plurality of pin portions are suitable to support a wafer at a distance from said upper surface; said chuck assembly movable in a direction substantially parallel to said upper surface from a first chuck position to a second chuck position only when said plurality of pin portions is not in said second pin position.
 11. The chuck of claim 10 wherein said movement of said chuck from said first chuck position to said second chuck position is enabled only when said pin portions are in said first pin position.
 12. The chuck of claim 10 wherein said movement parallel to said upper surface is not inhibited when said plurality of members are not extended.
 13. The chuck of claim 10 wherein vacuum is supplied to said upper surface of said chuck while said members are between said first pin position and said second pin position.
 14. The chuck of claim 10 wherein vacuum is supplied to said upper surface of said chuck while said pin portions are in said first pin position and said vacuum is reduced prior to extending said pin portions to said second pin position.
 15. A chuck assembly comprising: (a) an upper surface suitable to support a wafer thereon and including a portion defining an aperture; and (b) a plurality of members each including a pin portion moveable substantially normal with respect to said upper surface from a first pin position where said pin portions do not project from said upper surface to a second pin position where said pin portions project from said upper surface, air pressure in said aperture increasing as said pin portions are moved to said second pin position.
 16. The chuck assembly of claim 15 wherein said air pressure is not increased until at least one of said pin portions is substantially even with said upper surface of said chuck.
 17. The chuck assembly of claim 15 wherein said air pressure at said aperture is substantially atmospheric pressure when said pin portions are at said second pin position.
 18. A chuck assembly comprising: (a) an upper surface suitable to support a wafer thereon; (b) a plurality of members each including a pin portion located within the periphery of said upper surface and movable relative to said upper surface from a first position where said pin portions do not project from said upper surface to a second position where said pin portions project from said upper surface; and (c) an interlock inhibiting movement of said chuck assembly in a direction substantially parallel to said upper surface when at least one of said pin portions projects from said upper surface.
 19. A chuck assembly comprising: (a) an upper surface suitable to support a wafer thereon and movable in a direction substantially parallel to said upper surface; (b) a plurality of members each including a pin portion located within a periphery of said upper surface and movable relative to said upper surface from a first pin position where said pin portions do not project from said upper surface to a second pin position where said pin portions project from said upper surface; and (c) an interlock inhibiting relative movement of said pin portions from said first pin position unless said upper surface has been moved to a position where a wafer supported on said upper surface is not accessible to a probe. 